INSITU SPECTROSCOPIC ELLIPSOMETRY INVESTIGATION OF THE NUCLEATION OF MICROCRYSTALLINE SILICON

被引：23
|
作者：
DREVILLON, B
GODET, C
KUMAR, S
机构：
来源：
APPLIED PHYSICS LETTERS | 1987年 / 50卷 / 23期
关键词：
D O I：
10.1063/1.97757
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：1651 / 1653
页数：3
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