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- [4] TOOLS AND CHUCKS WERKSTATTSTECHNIK ZEITSCHRIFT FUR INDUSTRIELLE FERTIGUNG, 1988, 78 (01): : 56 - 60
- [9] Bipolar electrostatic chucks PLASMA ETCHING PROCESSES FOR SUB-QUARTER MICRON DEVICES, PROCEEDINGS, 2000, 99 (30): : 64 - 72
- [10] REQUIREMENTS FOR COLLET CHUCKS WERKSTATTSTECHNIK ZEITSCHRIFT FUR INDUSTRIELLE FERTIGUNG, 1983, 73 (11): : 707 - 708