AN ANALYTICAL FORMULA FOR HIGH-ENERGY ION RANGES

被引：0
|
作者：
MARTAN, J
HECKING, N
FAHRNER, WR
机构：
[1] Fern Universität, W-5800 Hagen
来源：
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY | 1992年 / 15卷 / 02期
关键词：
D O I：
10.1016/0921-5107(92)90053-C
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Analytical expressions for ion ranges and range straggles of ions implanted into a solid state target are presented. The calculations are extended to the high energy case (up to about 1 GeV). It is assumed that the ions lose their energy only by electronic collisions as described by the Bethe and Lindhart-Scharff-Schi(sic)tt formulae. Analytical results of calculations are compared with experimental data and other numerical computations (TRIM, PRAL and MARLOWE codes). Good agreement is obtained.
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页码：187 / 191
页数：5
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