ACCURACY CHARACTERISTICS OF PHOTOMETRIC ELLIPSOMETERS

被引：0

作者：

VORONTSOVA, EI

PETROVSKII, VI

GRIGOREV, VK

机构：

来源：

SOVIET MICROELECTRONICS | 1985年 / 14卷 / 03期

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D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：119 / 122

页数：4

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