SIMULATION OF 3-DIMENSIONAL ION-IMPLANTATION DISTRIBUTIONS

被引：3
|
作者：
ASHWORTH, DG
MOULAVIKAKHKI, M
OYEN, R
机构：
来源：
JOURNAL OF PHYSICS C-SOLID STATE PHYSICS | 1985年 / 18卷 / 26期
关键词：
D O I：
10.1088/0022-3719/18/26/015
中图分类号：
O469 [凝聚态物理学];
学科分类号：
070205 ;
摘要：
引用
收藏
页码：5043 / 5054
页数：12
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