X-RAY-LITHOGRAPHY - CAN IT BE JUSTIFIED

被引：0

作者：

WILSON, AD

机构：

来源：

PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS | 1985年 / 537卷

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D O I：

暂无

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

页码：85 / 101

页数：17

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[1] X-RAY-LITHOGRAPHY - CAN IT BE JUSTIFIED
WILSON, AD
[J]. SOLID STATE TECHNOLOGY, 1986, 29 (05) : 249 - 255
[2] MICROMECHANICS FOR X-RAY-LITHOGRAPHY AND X-RAY-LITHOGRAPHY FOR MICROMECHANICS
GUCKEL, H
[J]. PRECISION ENGINEERING AND OPTOMECHANICS, 1989, 1167 : 151 - 158
[3] X-RAY-LITHOGRAPHY
HEUBERGER, A
[J]. SOLID STATE TECHNOLOGY, 1986, 29 (02) : 93 - 101
[4] X-RAY-LITHOGRAPHY
WATTS, RK
[J]. SOLID STATE TECHNOLOGY, 1979, 22 (05) : 68 - &
[5] X-RAY-LITHOGRAPHY
HEUBERGER, A
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1988, 6 (01): : 107 - 121
[6] X-RAY-LITHOGRAPHY
GARRETTSON, GA
NEUKERMANS, AP
[J]. HEWLETT-PACKARD JOURNAL, 1982, 33 (08): : 14 - 18
[7] X-RAY-LITHOGRAPHY
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HAYASAKA, T
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 1980, 19 : 35 - 40
[8] X-RAY-LITHOGRAPHY
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YAMAZAKI, S
[J]. REVIEW OF THE ELECTRICAL COMMUNICATIONS LABORATORIES, 1979, 27 (1-2): : 105 - 115
[9] X-RAY-LITHOGRAPHY
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[J]. SOLID STATE TECHNOLOGY, 1985, 28 (05) : 111 - 111
[10] ULTRAVIOLET AND X-RAY-LITHOGRAPHY
NAGEL, DJ
[J]. PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS, 1981, 279 : 98 - 110