THIN POLYOXIDE FILMS GROWN BY RAPID THERMAL-PROCESSING

被引：7
|
作者：
ALVI, NS [1 ]
LEE, SK [1 ]
KWONG, DL [1 ]
机构：
[1] UNIV TEXAS,MICROELECTR RES CTR,DEPT ELECT & COMP ENGN,AUSTIN,TX 78712
来源：
IEEE ELECTRON DEVICE LETTERS | 1987年 / 8卷 / 05期
关键词：
D O I：
10.1109/EDL.1987.26601
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：197 / 199
页数：3
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