ORIENTED GROWTH OF ULTRATHIN TUNGSTEN FILMS ON SAPPHIRE SUBSTRATES

被引:18
|
作者
SOUK, JH
SEGMULLER, A
ANGILELLO, J
机构
关键词
D O I
10.1063/1.339775
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:509 / 512
页数:4
相关论文
共 50 条
  • [1] Soft films on hard substrates - nanoindentation of tungsten films on sapphire substrates
    Saha, R
    Nix, WD
    [J]. MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, 2001, 319 : 898 - 901
  • [2] Heteroepitaxial growth of {111}-oriented diamond films on platinum {111}/sapphire{0001} substrates
    Tachibana, T
    Yokota, Y
    Kobashi, K
    Yoshimoto, M
    [J]. JOURNAL OF CRYSTAL GROWTH, 1999, 205 (1-2) : 163 - 168
  • [3] Heteroepitaxial growth of {111}-oriented diamond films on platinum{111}/sapphire{0001} substrates
    Tachibana, Takeshi
    Yokota, Yoshihiro
    Kobashi, Koji
    Yoshimoto, Mamoru
    [J]. Journal of Crystal Growth, 1999, 205 (01): : 163 - 168
  • [4] Growth of Ti thin films on sapphire substrates
    S. Rao Peddada
    I. M. Robertson
    H. K. Birnbaum
    [J]. Journal of Materials Research, 1997, 12 : 1856 - 1865
  • [5] Growth of Ti thin films on sapphire substrates
    Peddada, SR
    Robertson, IM
    Birnbaum, HK
    [J]. JOURNAL OF MATERIALS RESEARCH, 1997, 12 (07) : 1856 - 1865
  • [6] ORIENTED GROWTH OF GAN FILMS ON SAPPHIRE SURFACE
    HWANG, JS
    CHONG, PJ
    [J]. JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 1995, 28 : S200 - S202
  • [7] Interface formation between ultrathin films of titanium and (0001) sapphire substrates
    Bernath, S
    Wagner, T
    Hofmann, S
    Ruhle, M
    [J]. SURFACE SCIENCE, 1998, 400 (1-3) : 335 - 344
  • [8] Growth of ultrathin pentacene films on polymeric substrates
    Ribic, Primoz Rebernik
    Kalihari, Vivek
    Frisbie, C. Daniel
    Bratina, Gvido
    [J]. PHYSICAL REVIEW B, 2009, 80 (11):
  • [9] Growth and characterization of AlGaN films on patterned sapphire substrates
    Kwak, Y. S.
    Lee, D. S.
    Kim, K. H.
    Kim, W. H.
    Moon, S. W.
    [J]. PHYSICS OF SEMICONDUCTORS: 30TH INTERNATIONAL CONFERENCE ON THE PHYSICS OF SEMICONDUCTORS, 2011, 1399
  • [10] Epitaxial growth of zirconium dioxide films on sapphire substrates
    Japan Atomic Energy Research Inst, Ibaraki-ken, Japan
    [J]. Appl Surf Sci, (198-201):