RADIOWAVE AND EDDY-CURRENT INSTRUMENTS FOR INSPECTING THE PARAMETERS OF DIFFUSION LAYERS OF SEMICONDUCTOR STRUCTURES

被引：0
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作者：
GRIGULIS, YK
PORINSH, VM
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来源：
SOVIET JOURNAL OF NONDESTRUCTIVE TESTING-USSR | 1986年 / 22卷 / 12期
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T [工业技术];
学科分类号：
08 ;
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页码：832 / 837
页数：6
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