RAMAN-SPECTROSCOPY FOR CHARACTERIZATION OF ANNEALING OF ION-IMPLANTED INP

被引：0
|
作者：
MYERS, DR [1 ]
GOURLEY, PL [1 ]
VAIDYANATHAN, KV [1 ]
DUNLAP, HL [1 ]
机构：
[1] HUGHES RES LABS, MALIBU, CA 90265 USA
来源：
INSTITUTE OF PHYSICS CONFERENCE SERIES | 1983年 / 65期
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D O I：
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中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
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页码：635 / 640
页数：6
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