OPTICAL-EMISSION SPECTROSCOPY OF RF DISCHARGE IN SF6

被引：35
|
作者：
RADOVANOV, SB
TOMCIK, B
PETROVIC, ZL
JELENKOVIC, BM
机构：
[1] Institute of Physics, 11001 Belgrade
来源：
JOURNAL OF APPLIED PHYSICS | 1990年 / 67卷 / 01期
关键词：
D O I：
10.1063/1.345211
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
In this paper we present experimental results obtained for a rf discharge in SF6 and for SF6 with Ar and/or N2. The data for power dependence of some emission lines usually used in actinometry are acquired and their applicability and excitation kinetics discussed. We also present the spatial (time averaged) variations of some emission lines. From such data the spatial dependence of the high-energy tail of the electron energy distribution function may be obtained.
引用
收藏
页码：97 / 107
页数：11
相关论文
共 50 条
  • [1] SPATIOTEMPORAL OPTICAL-EMISSION SPECTROSCOPY OF RF DISCHARGES IN SF6
    PETROVIC, ZL
    TOCHIKUBO, F
    KAKUTA, S
    MAKABE, T
    JOURNAL OF APPLIED PHYSICS, 1993, 73 (05) : 2163 - 2172
  • [2] Spatiotemporal optical emission spectroscopy of rf discharges in SF6
    1600, (73):
  • [3] TUNGSTEN AND TUNGSTEN SILICIDE + POLYSILICON ETCHING IN SF6 PLASMA AND RELATED OPTICAL-EMISSION
    GALVIER, J
    HENRY, D
    SADEGHI, N
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1984, 131 (08) : C308 - C308
  • [4] OPTICAL-EMISSION DIAGNOSTICS OF AN RF MAGNETRON SPUTTERING DISCHARGE
    MEHDI, T
    LEGRAND, PB
    DAUCHOT, JP
    WAUTELET, M
    HECQ, M
    SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY, 1993, 48 (08) : 1023 - 1033
  • [5] Spectroscopy Analysis of Emission Spectrum Characteristics and Discharge Recognition of SF6 Gas Discharge
    Li Y.
    Tang B.
    Han D.
    Qiu Z.
    Zhang G.
    Diangong Jishu Xuebao/Transactions of China Electrotechnical Society, 2022, 37 (07): : 1866 - 1874
  • [6] EMISSION YIELDS IN GLOW-DISCHARGE OPTICAL-EMISSION SPECTROSCOPY
    WEISS, Z
    SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY, 1993, 48 (10) : 1247 - 1257
  • [7] ABSOLUTE MEASUREMENT OF THE EXCITATION RATE AND DENSITY OF THE EXCITED SPECIES IN AN RF DISCHARGE FROM OPTICAL-EMISSION SPECTROSCOPY
    TOCHIKUBO, F
    MAKABE, T
    MEASUREMENT SCIENCE AND TECHNOLOGY, 1991, 2 (12) : 1133 - 1137
  • [8] OPTICAL-EMISSION SPECTROSCOPY OF SILICON DIOXIDE DEPOSITING RF-PLASMAS
    PESCH, TC
    DALLESKA, NF
    DOGART, KIL
    FISHER, ER
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1995, 209 : 373 - CHED
  • [9] OPTICAL-EMISSION SPECTROSCOPY ON THE GASEOUS ELECTRONICS CONFERENCE RF REFERENCE CELL
    ROBERTS, JR
    JOURNAL OF RESEARCH OF THE NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY, 1995, 100 (04) : 353 - 371
  • [10] Study of spatial and temporal evolution of Ar and F atoms in SF6/Ar microsecond pulsed discharge by optical emission spectroscopy
    Li, Hongyue
    Wu, Xingwei
    Li, Cong
    Wang, Yong
    Wu, Ding
    Liu, Jiamin
    Feng, Chunlei
    Ding, Hongbin
    PLASMA SCIENCE & TECHNOLOGY, 2019, 21 (07)
12345