SILICON MICROMECHANICAL DEVICES

被引：111
|
作者：
ANGELL, JB [1 ]
TERRY, SC [1 ]
BARTH, PW [1 ]
机构：
[1] STANFORD UNIV,INTEGRATED CIRCUITS LAB,STANFORD,CA 94305
来源：
SCIENTIFIC AMERICAN | 1983年 / 248卷 / 04期
关键词：
D O I：
10.1038/scientificamerican0483-44
中图分类号：
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号：
07 ; 0710 ; 09 ;
摘要：
引用
收藏
页码：44 / &
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