SCRATCH ADHESION TEST OF REACTIVELY SPUTTERED TIN COATINGS ON A SOFT SUBSTRATE

被引：64

作者：

JE, JH

GYARMATI, E

NAOUMIDIS, A

机构：

[1] KFA, Juelich, West Ger, KFA, Juelich, West Ger

来源：

THIN SOLID FILMS | 1986年 / 136卷 / 01期

关键词：

D O I：

10.1016/0040-6090(86)90108-2

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：57 / 67

页数：11

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