Mechanical and tribological properties of diamond-like carbon coatings prepared by pulsed laser deposition

被引:87
|
作者
Voevodin, AA [1 ]
Donley, MS [1 ]
Zabinski, JS [1 ]
Bultman, JE [1 ]
机构
[1] UNIV DAYTON, RES INST, DAYTON, OH 45469 USA
来源
SURFACE & COATINGS TECHNOLOGY | 1995年 / 76-77卷 / 1-3期
关键词
mechanical properties; tribological properties; diamond-like carbon; coatings; pulsed laser deposition;
D O I
10.1016/0257-8972(95)02521-9
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
The tribological properties of diamond-like carbon (DLC) coatings produced by pulsed laser deposition (PLD) are investigated. Films are grown onto steel substrates to 0.5 mu m using a 248 nm laser to ablate graphite and polycarbonate targets in high vacuum. Chemical bonding is studied with Raman, XPS and EELS techniques; mechanical and tribological properties are evaluated using microindentation and ball-on-disk friction tests. Coatings grown from graphite targets are amorphous DLC (a-C), while those grown from polycarbonate targets are amorphous hydrogenated carbon (a-C:H). The hardness of the a-C coatings is 55-70 GPa and the hardness of the a-C:H coatings is 12-20 GPa depending on the substrate bias. Friction coefficients of the coatings against steel and sapphire balls are determined in several environments: in air as a function of relative humidity, in dry nitrogen, and in 10 Pa vacuum. For a-C coatings, the friction coefficients are typically below 0.1 and are as low as 0.03 in dry nitrogen. In wear tests, a critical contact pressure of 1.4 GPa led to catastrophic adhesive failure of a-C coatings, whereas failure of a-C:H coatings is by wear-through after 5 x 10(3) cycles, Extremely low wear rates of 10(-9) mm(3) h(-1) m(-1) are found for a-C coatings at the contact pressure of 0.8 GPa.
引用
收藏
页码:534 / 539
页数:6
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