CHARACTERIZATION OF PLASMA DEPOSITED HALOCARBON POLYMER-FILMS CONTAINING SMALL GOLD PARTICLES

被引：25
|
作者：
MARTINU, L
BIEDERMAN, H
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 1985年 / 3卷 / 06期
关键词：
D O I：
10.1116/1.572804
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：2639 / 2642
页数：4
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