(001)-ORIENTED PBTIO3 FERROELECTRIC THIN-FILMS GROWN ON SI BY METAL-ORGANIC CHEMICAL-VAPOR-DEPOSITION

被引：4

作者：

MA, WH ^{[1
]}

ZHANG, MS ^{[1
]}

SHUN, L ^{[1
]}

CHEN, YF ^{[1
]}

MING, NB ^{[1
]}

机构：

[1] NANJING UNIV,CTR ADV STUDIES SCI & TECHNOL MICROSTRUCT,NANJING 210093,PEOPLES R CHINA

来源：

JOURNAL OF PHYSICS-CONDENSED MATTER | 1995年 / 7卷 / 47期

关键词：

D O I：

10.1088/0953-8984/7/47/023

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

PbTiO3 ferroelectric thin films have been prepared on Si (001) by metal-organic chemical vapour deposition. The as-grown films were characterized by scanning electron microscopy, x-ray diffraction and Raman spectroscopy. It is shown that the films were highly (001) oriented and had essentially the same lattice constants as the bulk single crystal. However, the as-grown films were subject to internal stress as shown by a downshift in the Raman modes when compared with a bulk single crystal.

引用

页码：9075 / 9080

页数：6

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