ARF EXCIMER LASER-INDUCED CVD OF ALUMINUM-OXIDE FILMS

被引：12
|
作者：
MINAKATA, M [1 ]
FURUKAWA, Y [1 ]
机构：
[1] NIPPON TELEGRAPH & TEL PUBL CORP, MUSASHINO ELECT COMMUN LAB, MUSASHINO, TOKYO 180, JAPAN
来源：
JOURNAL OF ELECTRONIC MATERIALS | 1986年 / 15卷 / 03期
关键词：
D O I：
10.1007/BF02655330
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
15
引用
收藏
页码：159 / 164
页数：6
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