Optimisation of indium tin oxide thin films for photovoltaic applications

被引：39
|
作者：
Martinez, MA
Herrero, J
Gutierrez, MT
机构：
[1] Institute de Energías Renovables (CIEMAT), E-28040 Madrid
来源：
THIN SOLID FILMS | 1995年 / 269卷 / 1-2期
关键词：
indium oxide; semiconductors; solar cells; sputtering;
D O I：
10.1016/0040-6090(95)06873-2
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The influence of deposition parameters on optoelectronic and structural properties of Sn-doped In2O3 thin films grown by r.f. magnetron sputtering has been investigated. Two different targets, In/Sn (95/5 at.%) and In2O3:SnO2 (95/5 wt.%) have been studied in order to compare resulting samples and try to reduce the substrate temperature down to room temperature. By using the In/Sn target, transparent conductive indium tin oxide has been obtained at a substrate temperature of 400 degrees C, with T = 80-90% and rho similar to 10(-4) Omega cm. Meanwhile, low sheet resistance, 5-15 Omega/square, and high transmittance in the visible range, 80-90%, have been measured for ITO coatings made at room temperature with the oxidized target, by introducing very low O-2 mass-flow rates in the sputtering chamber.
引用
收藏
页码：80 / 84
页数：5
相关论文
共 50 条
  • [1] Optimisation of chemical solution deposition of indium tin oxide thin films
    Sunde, Tor Olav Loveng
    Einarsrud, Mari-Ann
    Grande, Tor
    [J]. THIN SOLID FILMS, 2014, 573 : 48 - 55
  • [2] Thin-film polyimide/indium tin oxide composites for photovoltaic applications
    Lozano, Angel E.
    de Abajo, Javier
    de la Campa, Jose G.
    Guillen, Cecilia
    Herrero, Jose
    Gutierrez, Maria Teresa
    [J]. JOURNAL OF APPLIED POLYMER SCIENCE, 2007, 103 (06): : 3491 - 3497
  • [3] THIN INDIUM AND TIN FILMS FOR IMMUNOASSAY APPLICATIONS
    CHARLES, HK
    BLUM, NA
    WAJER, SD
    LEATHERSICH, CA
    BUREK, CL
    SMITH, JP
    [J]. JOHNS HOPKINS APL TECHNICAL DIGEST, 1988, 9 (01): : 11 - 15
  • [4] A study of degradation of indium tin oxide thin films on glass for display applications
    Leung, W. S.
    Chan, Y. C.
    Lui, S. M.
    [J]. MICROELECTRONIC ENGINEERING, 2013, 101 : 1 - 7
  • [5] Bandgap engineered high mobility indium oxide thin films for photovoltaic applications
    Gupta, R. K.
    Ghosh, K.
    Kahol, P. K.
    [J]. TRANSPARENT CONDUCTING OXIDES AND APPLICATIONS, 2011, 1315 : 59 - 64
  • [6] FABRICATION AND CHARACTERIZATION OF INDIUM TIN OXIDE THIN-FILMS FOR ELECTROLUMINESCENT APPLICATIONS
    TUETA, R
    BRAGUIER, M
    [J]. THIN SOLID FILMS, 1981, 80 (1-3) : 143 - 148
  • [7] Zirconium doped indium oxide thin films as transparent electrodes for photovoltaic applications
    Micali, Melanie
    Lo Mastro, Andrea
    Tringali, Fiorella
    Leonardi, Marco
    Lombardo, Salvatore
    Bengasi, Giuseppe
    Colletti, Claudio
    Foti, Marina
    Llado, Esther Alarcon
    Miritello, Maria
    Franzo, Giorgia
    Terrasi, Antonio
    [J]. SOLAR ENERGY MATERIALS AND SOLAR CELLS, 2024, 271
  • [8] Substitution of transparent conducting oxide thin films for indium tin oxide transparent electrode applications
    Minami, Tadatsugu
    [J]. THIN SOLID FILMS, 2008, 516 (07) : 1314 - 1321
  • [9] Characterization of sputtered thin films of indium tin oxide
    Cui, HN
    Teixeira, V
    [J]. FRONTIERS OF SOLID STATE CHEMISTRY, 2002, : 369 - 376
  • [10] Effect of indium content on the characteristics of indium tin oxide thin films
    Navya, K.
    Bharath, S. P.
    Bangera, Kasturi, V
    Shivakumar, G. K.
    [J]. MATERIALS RESEARCH EXPRESS, 2018, 5 (09):
12345