SURFACE PROFILE RECONSTRUCTION USING NEAR-FIELD DATA

被引:59
|
作者
GREFFET, JJ
SENTENAC, A
CARMINATI, R
机构
[1] Laboratoire d'Energétique Moléculaire et Macroscopique, Combustion, Ecole Centrale Paris, 92295 Châtenay-Malabry, Grande voie des Vignes
关键词
D O I
10.1016/0030-4018(95)00033-5
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
We consider the problem of the reconstruction of a surface profile separating two dielectric media using the data obtained with a PSTM/STOM. We show that it is possible to solve the inverse problem. A numerical simulation has been performed for one-dimensional acid two-dimensional surfaces. We show that the reconstruction procedure enhances the super-resolution capabilities of the technique.
引用
收藏
页码:20 / 24
页数:5
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