Synthesis and properties of zirconium, niobium, and tantalum oxide films

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作者：

Kozik, VV

Skorik, NA

Borilo, LP

Dyukov, VV

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ZHURNAL NEORGANICHESKOI KHIMII | 1995年 / 40卷 / 10期

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O61 [无机化学];

学科分类号：

070301 ; 081704 ;

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页码：1596 / 1598

页数：3

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