FREQUENCY-DEPENDENCE OF ION-BOMBARDMENT OF GROUNDED SURFACES IN RF ARGON GLOW-DISCHARGES IN A PLANAR SYSTEM

被引：0
|
作者：
KOHLER, K [1 ]
HORNE, DE [1 ]
COBURN, JW [1 ]
机构：
[1] IBM CORP,RES LAB,SAN JOSE,CA 95193
来源：
JOURNAL OF APPLIED PHYSICS | 1985年 / 58卷 / 09期
关键词：
D O I：
暂无
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：3350 / 3355
页数：6
相关论文
共 10 条
  • [1] PRESSURE AND FREQUENCY-DEPENDENCE OF ION-BOMBARDMENT ENERGY-DISTRIBUTIONS FROM RF DISCHARGES
    TOUPS, MF
    ERNIE, DW
    JOURNAL OF APPLIED PHYSICS, 1990, 68 (12) : 6125 - 6132
  • [2] PLASMA POTENTIALS OF 13.56 MHZ RF ARGON GLOW-DISCHARGES IN A PLANAR SYSTEM
    KOHLER, K
    COBURN, JW
    HORNE, DE
    KAY, E
    KELLER, JH
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (03): : 638 - 639
  • [3] FREQUENCY-DEPENDENCE ON THE STRUCTURE OF RADIO-FREQUENCY GLOW-DISCHARGES IN AR
    KAKUTA, S
    MAKABE, T
    TOCHIKUBO, F
    JOURNAL OF APPLIED PHYSICS, 1993, 74 (08) : 4907 - 4914
  • [4] PLASMA POTENTIALS OF 13.56-MHZ RF ARGON GLOW-DISCHARGES IN A PLANAR SYSTEM
    KOHLER, K
    COBURN, JW
    HORNE, DE
    KAY, E
    KELLER, JH
    JOURNAL OF APPLIED PHYSICS, 1985, 57 (01) : 59 - 66
  • [5] ION KINETIC-ENERGY DISTRIBUTIONS IN ARGON RF GLOW-DISCHARGES
    OLTHOFF, JK
    VANBRUNT, RJ
    RADOVANOV, SB
    JOURNAL OF APPLIED PHYSICS, 1992, 72 (10) : 4566 - 4574
  • [6] THE EFFECTS OF ION-BOMBARDMENT ON THE SURFACE HARDENING OF INCONEL-625 IN DC GLOW-DISCHARGES
    RIZK, A
    SAAD, G
    SURFACE TECHNOLOGY, 1980, 11 (06): : 415 - 420
  • [7] ION ENERGY-DISTRIBUTION OF 13.56 MHZ RF GLOW-DISCHARGES IN A PLANAR SYSTEM CATHODE
    OTSUBO, T
    OHARA, K
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1991, 30 (08): : 1882 - 1884
  • [8] AN INVESTIGATION INTO THE EFFECTS OF PLASMA BOMBARDMENT ANISOTROPY IN LOW-FREQUENCY RF GLOW-DISCHARGES
    JAMES, AS
    FANCEY, KS
    MATTHEWS, A
    MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, 1991, 140 : 517 - 522
  • [9] CALCULATION OF ION ENERGY-DISTRIBUTIONS IN LOW-FREQUENCY RF GLOW-DISCHARGES
    JAMES, AS
    MATTHEWS, A
    SURFACE & COATINGS TECHNOLOGY, 1993, 59 (1-3): : 86 - 90
  • [10] Ion energy distribution of 13.56 MHz rf glow discharges in a planar system cathode
    Otsubo, Toru, 1882, (30):
1