TRIBOLOGICAL AND ELECTRICAL-PROPERTIES OF METAL-CONTAINING HYDROGENATED CARBON-FILMS

被引：241
|
作者：
DIMIGEN, H
HUBSCH, H
MEMMING, R
机构：
来源：
APPLIED PHYSICS LETTERS | 1987年 / 50卷 / 16期
关键词：
D O I：
10.1063/1.97968
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：1056 / 1058
页数：3
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