THEORY OF DEVELOPMENT OF SURFACE-TOPOGRAPHY UNDER SPATIOTEMPORALLY HETEROGENEOUS SPUTTERING CONDITIONS

被引：8
|
作者：
CARTER, G
NOBES, MJ
机构：
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1984年 / 2卷 / 1-3期
关键词：
D O I：
10.1016/0168-583X(84)90282-9
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：635 / 639
页数：5
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