ROTATED TILTING IN LATTICE-MISMATCHED HETEROEPITAXIAL SYSTEMS

被引:14
|
作者
RIESZ, F [1 ]
机构
[1] UNIV LINZ,FORSCHUNGSINST OPTOELEKTR,A-4040 LINZ,AUSTRIA
关键词
D O I
10.1016/0022-0248(94)90515-0
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
The misorientation of epilayer lattice planes in lattice-mismatched heterostructures is discussed. The geometry of the tilt reflects the overall symmetry of the system. Thus, rotation of tilt axis contains information on the anisotropy of dislocation nucleation/glide in low misfit, and on the initial growth processes in high misfit systems. In coherent systems, no rotation is expected. The model shows good agreement with experimental observations.
引用
收藏
页码:213 / 218
页数:6
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