OPTIMIZATION OF A GRATING DEVICE FOR COUPLING RADIATION IN AND OUT OF A THIN-FILM WAVE-GUIDE ON A SILICON SUBSTRATE

被引：0

作者：

PARRIAUX, O ^{[1
]}

SYCHUGOV, VA ^{[1
]}

TIKHOMIROV, AE ^{[1
]}

TISHCHENKO, AV ^{[1
]}

USIEVICH, BA ^{[1
]}

机构：

[1] RUSSIAN ACAD SCI,INST GEN PHYS,MOSCOW,RUSSIA

来源：

KVANTOVAYA ELEKTRONIKA | 1994年 / 21卷 / 11期

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

An analysis is reported of the operation and optimisation of the parameters of a grating device for coupling radiation in and out of a thin-film waveguide formed on a silicon substrate. The reflection of light at the interface between a buffer layer and silicon significantly alters the operation of such a grating coupler. The conditions for maximum coupling out of radiation into air or into the substrate are obtained for the TE and TM modes of the thin-film waveguide.

引用

页码：1090 / 1092

页数：3

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