ELECTRIC AND PYROELECTRIC BEHAVIORS OF PBTIO3 THIN-FILMS FORMED BY AN EXCIMER-LASER ABLATION TECHNIQUE

Ferroelectric PbTiO3 thin films have been formed on base electrodes of platinum by an ArF excimer laser ablation technique. X-ray diffraction patterns of the films show c-axis orientation with a rocking angle of 0.8-degrees-0.5-degrees under the cooling rate conditions of less than -75-degrees-C/min. These films exhibit ferroelectric hysteresis loops. The PbTiO3 film, formed at 550-degrees-C in O2 pressure of 100 mTorr, has a dielectric constant, coercive field and remnant polarization of 130, 280 kV/cm and 80 muC/cm2, respectively. These values are too large but they are rather similar to the values of theoretical data. Voltage responsivities of these films are 1000-1500 V/W at the frequency of 10 Hz even without poling treatment.