SYMMETRY AND UNIFORMITY OF SIMULTANEOUSLY EVAPORATED COATINGS - HOW CAN THE FILM THICKNESS DISTRIBUTION BE IMPROVED

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作者：
KRAUS, T
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来源：
VAKUUM-TECHNIK | 1982年 / 31卷 / 05期
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中图分类号：
TH [机械、仪表工业];
学科分类号：
0802 ;
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页码：130 / 145
页数：16
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