NEW ENERGY-FILTERING TEM - PRINCIPLES AND APPLICATIONS

An EFTEM featuring an Omega-type imaging spectrometer which is integrated in the optical ray path is described. The instrument provides optimum simultaneous use of the signals which are contained within the spectrum of inelastically scattered electrons. For ease-of-use the optical ray path is designed for using fixed conjugate imaging planes and planes of symmetry. Fast recording of large area elemental distribution images, high quality EELS, and low background filtered diffraction patterns become feasible and examples will be shown.