DIFFRACTION EFFECTS IN AUGER QUANTITATIVE-ANALYSIS ON III-V COMPOUNDS

被引:11
|
作者
VALERI, S [1 ]
DIBONA, A [1 ]
NAVA, E [1 ]
机构
[1] UNITA INFM,I-41100 MODENA,ITALY
关键词
D O I
10.1016/0169-4332(93)90390-W
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
The anisotropy in surface and subsurface ionization due to the primary electron diffraction has been conflictually reported to play a minor or major role in Auger spectroscopy, and the influence of instrumental and physical parameters has been discussed. We report on the effects of incoming beam diffraction on the quantitative analysis of cleaved, sputtered and Cs covered III-V compounds. We show that measurements must be taken into account for crystalline specimen orientation with respect to the incident beam direction.
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页码:20 / 23
页数:4
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