THE ENERGY-DISTRIBUTION OF SPUTTERED PARTICLES AT LOW BOMBARDING ENERGIES

被引：42
|
作者：
URBASSEK, M
机构：
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1984年 / 4卷 / 03期
关键词：
D O I：
10.1016/0168-583X(84)90579-2
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：356 / 363
页数：8
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