MATERIALS QUALITY ASSURANCE FOR VLSI MANUFACTURING

被引：0
|
作者：
KOHOUTEK, HJ
机构：
[1] Hewlett-Packard Co, Fort Collins,, CO, USA, Hewlett-Packard Co, Fort Collins, CO, USA
来源：
MICROELECTRONICS AND RELIABILITY | 1986年 / 26卷 / 05期
关键词：
D O I：
10.1016/0026-2714(86)90237-4
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
12
引用
收藏
页码：943 / 953
页数：11
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