DECOMPOSITION KINETICS OF A STATIC DIRECT-CURRENT SILANE GLOW-DISCHARGE

被引：117

|

作者：

LONGEWAY, PA

ESTES, RD

WEAKLIEM, HA

机构：

来源：

JOURNAL OF PHYSICAL CHEMISTRY | 1984年 / 88卷 / 01期

关键词：

D O I：

10.1021/j150645a018

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

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页码：73 / 77

页数：5

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