HIGH-QUALITY THICK EPITAXIAL-FILMS FOR POWER DEVICES

被引:0
|
作者
CHANG, HR [1 ]
ROSCZAK, JS [1 ]
MCGEE, TC [1 ]
机构
[1] GE,CTR CORP RES & DEV,SCHENECTADY,NY 12345
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D O I
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中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
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页码:C316 / C316
页数:1
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