STRUCTURAL AND OPTICAL-PROPERTIES OF PLASMA-DEPOSITED BORON-NITRIDE FILMS

被引：92
|
作者：
YUZURIHA, TH [1 ]
HESS, DW [1 ]
机构：
[1] UNIV CALIF BERKELEY,DEPT CHEM ENGN,BERKELEY,CA 94720
来源：
THIN SOLID FILMS | 1986年 / 140卷 / 02期
关键词：
D O I：
10.1016/0040-6090(86)90263-4
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：199 / 207
页数：9
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