CHARACTERISTICS AND BORON DOPING EFFECT OF HYDROGENATED AMORPHOUS-CARBON FILMS

被引：7
|
作者：
NODA, K
NAKAJIMA, A
ITOH, T
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1986年 / 60卷 / 04期
关键词：
D O I：
10.1063/1.337288
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：1540 / 1542
页数：3
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