ELEMENTARY PROCESS OF THE THERMAL-DECOMPOSITION OF ALKYL GALLIUM

被引：37
|
作者：
OIKAWA, S
TSUDA, M
MORISHITA, M
MASHITA, M
KUNIYA, Y
机构：
[1] TOSHIBA CORP,TOSHIBA RES & DEV CTR,ELECTRON DEVICES LAB,SAIWAI KU,KAWASAKI 210,JAPAN
[2] CHUO UNIV,FAC SCI & ENGN,BUNKYO KU,TOKYO 112,JAPAN
来源：
JOURNAL OF CRYSTAL GROWTH | 1988年 / 91卷 / 04期
关键词：
D O I：
10.1016/0022-0248(88)90114-5
中图分类号：
O7 [晶体学];
学科分类号：
0702 ; 070205 ; 0703 ; 080501 ;
摘要：
引用
收藏
页码：471 / 480
页数：10
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