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- [2] Plasma-enhanced chemical-vapor deposition of titanium aluminum carbonitride/amorphous-carbon nanocomposite thin films JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2002, 20 (01): : 87 - 92
- [6] Modeling catalyst nucleation for carbon nanotube growth by chemical-vapor and plasma-enhanced chemical-vapor deposition methods Journal of Nanoparticle Research, 2010, 12 : 521 - 528
- [9] PLASMA-ENHANCED CHEMICAL-VAPOR-DEPOSITION OF AMORPHOUS SE FILMS JOURNAL DE PHYSIQUE IV, 1995, 5 (C5): : 1109 - 1115