DEFECT STRUCTURE OF ION-PLATED TITANIUM NITRIDE COATINGS

被引：40
|
作者：
MADER, W [1 ]
FISCHMEISTER, HF [1 ]
BERGMANN, E [1 ]
机构：
[1] BALZERS AG, THIN FILM MET, BALZERS, LIECHTENSTEIN
来源：
THIN SOLID FILMS | 1989年 / 182卷
关键词：
D O I：
10.1016/0040-6090(89)90251-4
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：141 / 152
页数：12
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