N-SUBSTITUTIONAL AND P-SUBSTITUTIONAL DOPING OF RF-SPUTTERED A-SIC-H

被引：5
|
作者：
PEREIRA, JMT
BANERJEE, PK
MITRA, SS
机构：
来源：
THIN SOLID FILMS | 1985年 / 127卷 / 3-4期
关键词：
D O I：
10.1016/0040-6090(85)90203-2
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：337 / 350
页数：14
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