HIGHLY CONDUCTIVE AND TRANSPARENT SILICON DOPED ZINC-OXIDE THIN-FILMS PREPARED BY RF MAGNETRON SPUTTERING

被引：130

|

作者：

MINAMI, T

SATO, H

NANTO, H

TAKATA, S

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1986年 / 25卷 / 09期

关键词：

D O I：

10.1143/JJAP.25.L776

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：L776 / L779

页数：4

相关论文

共 50 条

[1] HIGHLY CONDUCTIVE AND TRANSPARENT ALUMINUM DOPED ZINC-OXIDE THIN-FILMS PREPARED BY RF MAGNETRON SPUTTERING
MINAMI, T
NANTO, H
TAKATA, S
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1984, 23 (05): : L280 - L282
[2] CONDUCTION MECHANISM OF HIGHLY CONDUCTIVE AND TRANSPARENT ZINC-OXIDE THIN-FILMS PREPARED BY MAGNETRON SPUTTERING
MINAMI, T
SATO, H
OHASHI, K
TOMOFUJI, T
TAKATA, S
[J]. JOURNAL OF CRYSTAL GROWTH, 1992, 117 (1-4) : 370 - 374
[3] INDIUM-DOPED ZINC-OXIDE THIN-FILMS PREPARED BY RF MAGNETRON SPUTTERING
SHIH, I
QIU, CX
[J]. JOURNAL OF APPLIED PHYSICS, 1985, 58 (06) : 2400 - 2401
[4] HIGHLY TRANSPARENT AND CONDUCTIVE ZINC-STANNATE THIN-FILMS PREPARED BY RF MAGNETRON SPUTTERING
MINAMI, T
SONOHARA, H
TAKATA, S
SATO, H
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1994, 33 (12A): : L1693 - L1696
[5] PROPERTIES OF CONDUCTIVE ZINC-OXIDE FILMS FOR TRANSPARENT ELECTRODE APPLICATIONS PREPARED BY RF MAGNETRON SPUTTERING
SCHROPP, REI
MADAN, A
[J]. JOURNAL OF APPLIED PHYSICS, 1989, 66 (05) : 2027 - 2031
[6] OPTICAL-PROPERTIES OF ALUMINUM DOPED ZINC-OXIDE THIN-FILMS PREPARED BY RF MAGNETRON SPUTTERING
MINAMI, T
NANTO, H
TAKATA, S
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1985, 24 (08): : L605 - L607
[7] GROUP-III IMPURITY DOPED ZINC-OXIDE THIN-FILMS PREPARED BY RF MAGNETRON SPUTTERING
MINAMI, T
SATO, H
NANTO, H
TAKATA, S
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1985, 24 (10): : L781 - L784
[8] CONDUCTIVE AND TRANSPARENT AL-DOPED ZNO THIN-FILMS PREPARED BY RF MAGNETRON SPUTTERING
CHEN, YI
DUH, JG
[J]. MATERIALS CHEMISTRY AND PHYSICS, 1991, 27 (04) : 427 - 439
[9] ELECTRICAL AND OPTICAL-PROPERTIES OF ZINC-OXIDE THIN-FILMS PREPARED BY RF MAGNETRON SPUTTERING FOR TRANSPARENT ELECTRODE APPLICATIONS
NANTO, H
MINAMI, T
SHOOJI, S
TAKATA, S
[J]. JOURNAL OF APPLIED PHYSICS, 1984, 55 (04) : 1029 - 1034
[10] HIGHLY CONDUCTIVE AND TRANSPARENT ZINC-OXIDE FILMS PREPARED BY RF MAGNETRON SPUTTERING UNDER AN APPLIED EXTERNAL MAGNETIC-FIELD
MINAMI, T
NANTO, H
TAKATA, S
[J]. APPLIED PHYSICS LETTERS, 1982, 41 (10) : 958 - 960

← 1 2 3 4 5 →