OPTICAL MEASUREMENT SYSTEM FOR THE DETERMINATION OF ACOUSTIC PHASE VELOCITIES WITH HIGH-ACCURACY

被引：2
|
作者：
HOLM, A
SOLKNER, G
RUILE, W
WEIGEL, R
机构：
[1] Technische Universität München, D-80333 München
[2] Siemens AG München, Corporate Research and Development, D-81739 München
来源：
MICROELECTRONIC ENGINEERING | 1994年 / 24卷 / 1-4期
关键词：
D O I：
10.1016/0167-9317(94)90084-1
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A technique for the optical measurement of the surface acoustic wavefield on piezo-electric materials has been developed. This allows the determination of the phase velocity with a resolution of 1.5.10(-5). This fundamental parameter for the design of SAW devices can be measured as a function of crystal cut, temperature and frequency.
引用
收藏
页码：317 / 323
页数：7
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