PHASE-SHIFTING IN AN OBLIQUE-INCIDENCE INTERFEROMETER

被引：11
|
作者：
BOEBEL, D
PACKROSS, B
TIZIANI, HJ
机构：
[1] UNIV STUTTGART,INST TECH OPT,W-7000 STUTTGART 80,GERMANY
[2] UNIV STUTTGART,INST APPL OPT,W-7000 STUTTGART 80,GERMANY
来源：
OPTICAL ENGINEERING | 1991年 / 30卷 / 12期
关键词：
OBLIQUE INCIDENCE INTERFEROMETERS; FRINGE ANALYSIS; PHASE-STEPPING TECHNIQUE; VARIABLE FRINGE DENSITY; OPTICALLY ROUGH SURFACES;
D O I：
10.1117/12.56025
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
The evaluation of the interference pattern of a prism interferometer by a phase-stepping technique is described. The required phase shift is achieved by moving the surface under test perpendicular to the hypotenuse of the prism. Limits of this phase-shifting technique are discussed. A calibration method of the phase shift between the interferograms for the adjustable sensitivity of the interferometer is shown. Finally measurements of technical surfaces are presented.
引用
收藏
页码：1910 / 1914
页数：5
相关论文
共 50 条
  • [1] OBLIQUE-INCIDENCE INTERFEROMETER
    MURTY, MVRK
    SHUKLA, RP
    OPTICAL ENGINEERING, 1976, 15 (05) : 461 - 463
  • [2] IMPROVED OBLIQUE-INCIDENCE INTERFEROMETER
    HARIHARAN, P
    OPTICAL ENGINEERING, 1975, 14 (03) : 257 - 258
  • [3] Phase-shifting shearing interferometer
    Griffin, DW
    OPTICS LETTERS, 2001, 26 (03) : 140 - 141
  • [4] Phase-shifting scatterplate interferometer
    North-Morris, M
    Wyant, JC
    ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGY 2000, 2000, 4231 : 59 - 66
  • [5] Calibration for phase-shifting polarizer array in the simultaneous phase-shifting interferometer
    Yin, Jiayi
    Xu, Chen
    Su, Junhong
    Chen, Lei
    Zhongguo Jiguang/Chinese Journal of Lasers, 2009, 36 (SUPPL. 2): : 178 - 183
  • [6] Research on phase-shifting characteristic of retarder array in simultaneous phase-shifting interferometer
    School of Electronic and Optical Engineering, Nanjing University of Science and Technology, Nanjing
    Jiangsu
    210094, China
    不详
    Jiangsu
    210042, China
    Guangxue Xuebao, 4
  • [7] Theory of oblique-incidence phase retarders
    Nagib, N.N.
    Applied Optics, 1997, 36 (07): : 1547 - 1552
  • [8] Phase-shifting interferometer for surface inspection
    Tam, SC
    Low, BY
    Chua, HC
    Ho, ATS
    Neo, WP
    AUTOMATIC INSPECTION AND NOVEL INSTRUMENTATION, 1997, 3185 : 118 - 124
  • [9] Phase-shifting point diffraction interferometer
    Medecki, H
    Tejnil, E
    Goldberg, KA
    Bokor, J
    OPTICS LETTERS, 1996, 21 (19) : 1526 - 1528
  • [10] Phase-shifting Savart shearing interferometer
    Lin, Shyh-Tsong
    Shih, Sheng-Hsiung
    Feng, Hsiung-Nien
    Tsai, Ting-Chiang
    OPTICAL ENGINEERING, 2006, 45 (12)
12345