PERSPECTIVES ON RESIDUAL-GAS ANALYSIS

被引：12

作者：

LICHTMAN, D ^{[1
]}

机构：

[1] UNIV WISCONSIN, SURFACE STUDIES LAB, MILWAUKEE, WI 53201 USA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 1984年 / 2卷 / 02期

关键词：

D O I：

10.1116/1.572723

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：200 / 205

页数：6

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