MEASUREMENT OF RESIDUAL-STRESSES IN FILMS OF UNKNOWN ELASTIC-MODULUS

被引：6
|
作者：
CUTHRELL, RE
GERSTLE, FP
MATTOX, DM
机构：
来源：
REVIEW OF SCIENTIFIC INSTRUMENTS | 1989年 / 60卷 / 06期
关键词：
D O I：
10.1063/1.1140310
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：1018 / 1020
页数：3
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