Supercritical carbon dioxide process for releasing stuck cantilever beams

被引：3
|
作者：
Hui Yu [1 ]
Gao Chaoqun [1 ]
Wang Lei [1 ]
Jing Yupeng [1 ]
机构：
[1] Chinese Acad Sci, Inst Microelect, Integrated Circuit Adv Proc Ctr, Beijing 100029, Peoples R China
来源：
JOURNAL OF SEMICONDUCTORS | 2010年 / 31卷 / 10期
基金：
中国国家自然科学基金;
关键词：
SCCO2; sticking effect; release; cantilever beam; MEMS;
D O I：
10.1088/1674-4926/31/10/106001
中图分类号：
O469 [凝聚态物理学];
学科分类号：
070205 ;
摘要：
The multi-SCCO2 (supercritical carbon dioxide) release and dry process based on our specialized SCCO2 semiconductor process equipment is investigated and the releasing mechanism is discussed. The experiment results show that stuck cantilever beams were held up again under SCCO2 high pressure treatment and the repeatability of this process is nearly 100%.
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页数：4
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