AN IMPROVED MO/N-GAAS CONTACT BY INTERPOSITION OF A THIN PD LAYER

被引:2
|
作者
NEE, CY [1 ]
CHANG, CY [1 ]
CHENG, TF [1 ]
HUANG, TS [1 ]
机构
[1] NATL CHIAO TUNG UNIV,INST ELECTR,HSINCHU,TAIWAN
关键词
D O I
10.1109/55.728
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:315 / 316
页数:2
相关论文
共 50 条
  • [1] AN IMPROVED AUGE OHMIC CONTACT TO N-GAAS
    NATHAN, MI
    HEIBLUM, M
    [J]. SOLID-STATE ELECTRONICS, 1982, 25 (10) : 1063 - 1065
  • [2] ELECTRICAL AND STRUCTURAL CHARACTERIZATION OF MO/SI CONTACT TO N-GAAS
    KULKARNI, AK
    PATKAR, MP
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1990, 8 (03): : 2049 - 2054
  • [3] THE SI/PD(SI,GE) OHMIC CONTACT ON N-GAAS
    WANG, LC
    LI, YZ
    KAPPES, M
    LAU, SS
    HWANG, DM
    SCHWARZ, SA
    SANDS, T
    [J]. APPLIED PHYSICS LETTERS, 1992, 60 (24) : 3016 - 3018
  • [4] PD-GE CONTACT TO N-GAAS WITH THE TIW DIFFUSION BARRIER
    HUANG, WC
    LEI, TF
    LEE, CL
    [J]. JOURNAL OF ELECTRONIC MATERIALS, 1994, 23 (04) : 397 - 401
  • [5] OHMIC CONTACT FORMATION MECHANISM IN THE GE/PD/N-GAAS SYSTEM
    MARSHALL, ED
    LAU, SS
    PALMSTROM, CJ
    SANDS, T
    SCHWARTZ, CL
    SCHWARZ, SA
    HARBISON, JP
    FLOREZ, LT
    [J]. CHEMISTRY AND DEFECTS IN SEMICONDUCTOR HETEROSTRUCTURES, 1989, 148 : 163 - 168
  • [6] On the low resistance Au/Ge/Pd ohmic contact to n-GaAs
    Hao, PH
    Wang, LC
    Deng, F
    Lau, SS
    Cheng, JY
    [J]. JOURNAL OF APPLIED PHYSICS, 1996, 79 (08) : 4211 - 4215
  • [7] LEAKAGE EFFECTS IN N-GAAS MESFET WITH N-GAAS BUFFER LAYER
    WANG, YC
    BAHRAMI, M
    [J]. INTERNATIONAL JOURNAL OF ELECTRONICS, 1984, 57 (05) : 647 - 663
  • [8] Current filamentation in n-GaAs thin films with different contact geometries
    Schwarz, G
    Lehmann, C
    Reimann, A
    Schöll, E
    Hirschinger, J
    Prettl, W
    Novák, V
    [J]. SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2000, 15 (06) : 593 - 603
  • [9] THE TEMPERATURE-DEPENDENCE OF CONTACT RESISTIVITY OF THE GE PD AND THE SI PD NONALLOYED CONTACT SCHEME ON N-GAAS
    YU, LS
    WANG, LC
    MARSHALL, ED
    LAU, SS
    KUECH, TF
    [J]. JOURNAL OF APPLIED PHYSICS, 1989, 65 (04) : 1621 - 1625
  • [10] CONTACT REACTIONS IN PD/N-GAAS JUNCTIONS FORMED BY PALLADIUM ELECTROLESS DEPOSITION
    STREMSDOERFER, G
    NGUYEN, D
    JAFFREZICRENAULT, N
    MARTIN, JR
    CLECHET, P
    [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1993, 140 (02) : 519 - 525