THERMAL-CONDUCTIVITY AND STRUCTURE OF DIAMOND FILMS

被引:5
|
作者
NEPSHA, VI
GRINBERG, VR
KLYUEV, YA
KOLCHEMANOV, NA
NALETOV, AM
机构
[1] NPO VNIIALMAZ, 129110 Moscow
来源
SURFACE & COATINGS TECHNOLOGY | 1991年 / 47卷 / 1-3期
关键词
D O I
10.1016/0257-8972(91)90304-F
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
We have studied two mechanisms that enable us to describe, using the Debye theory, the temperature dependence of thermal conductivity of diamond films in the range 10-300 K, previously measured experimentally by Morelli et al. The first mechanism accounts for boundary scattering of phonons, allowing for specular phonon reflection. The microcrystallites have a calculated size of 1.6-mu-m, which is similar to the results obtained by Morelli et al., and the magnitude of the boundary roughness is H = 9-10 angstrom. The second mechanism is a phonon scattering mechanism for isometric inclusions which possess different density and elasticity, compared with the diamond matrix. The former can be a non-diamond phase zone. The calculations show that the films contain 1.1 x 10(18) cm-3 of the material of diameter a = 12 angstrom, which corresponds to the volume of the non-diamond phase concentration, and is almost-equal-to 0.1%. Due to the fact that the values of H and a are almost equal, it is possible to suggest that the non-diamond carbon phase is concentrated close to the microcrystallite boundaries. This makes the two approaches fully complementary.
引用
收藏
页码:388 / 391
页数:4
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