MAGNETRON REACTIVE SPUTTERING OF COPPER INDIUM SELENIDE

被引：28
|
作者：
THORNTON, JA [1 ]
LOMMASSON, TC [1 ]
机构：
[1] UNIV ILLINOIS,DEPT MAT SCI,URBANA,IL 61801
来源：
SOLAR CELLS | 1986年 / 16卷 / 1-4期
关键词：
D O I：
10.1016/0379-6787(86)90082-7
中图分类号：
TE [石油、天然气工业]; TK [能源与动力工程];
学科分类号：
0807 ; 0820 ;
摘要：
引用
收藏
页码：165 / 180
页数：16
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