BORON PROFILES IN AMORPHOUS AND CRYSTALLINE SILICON

被引：0
|
作者：
ZHENG, ZH
WANG, YQ
XIANG, JZ
MA, ZH
LIAO, CG
机构：
来源：
VACUUM | 1989年 / 39卷 / 2-4期
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中图分类号：
T [工业技术];
学科分类号：
08 ;
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页码：323 / 324
页数：2
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