ELECTRON-SPECTROSCOPY AND ELECTRON-MICROSCOPY OF A-C-H FILMS

被引:1
|
作者
HENDERSON, AE [1 ]
FITZGERALD, AG [1 ]
RICKERBY, DS [1 ]
STOREY, BE [1 ]
机构
[1] UKAEA,HARWELL LAB,CTR MAT ENGN,HARWELL OX11 0RA,BERKS,ENGLAND
关键词
D O I
10.1016/0368-2048(90)85041-7
中图分类号
O433 [光谱学];
学科分类号
0703 ; 070302 ;
摘要
Some of the techniques used in electron Spectroscopy and electron microscopy may be combined to give a full characterization of new materials. This requires a correlation of results from structural, microstructural and analytical techniques. Hydrogenated amorphous carbon (a-C:H), diamond and diamond-like carbon films were examined using XPS, XAES, TEM and SEM. © 1990.
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页码:475 / 483
页数:9
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